Building a green and low-carbon supply chain is one of the key strategies for TSMC's sustainable operations. Adhering to the principles of minimizing waste production, maximizing resource recycling, and optimizing supplier management, TSMC has developed new cleaning methodologies for chemical material packaging to improve resource recycling. Furthermore, TSMC collaborates with suppliers to optimize the materials used in drum packaging, proactively replacing raw materials that contain Substance of Very High Concern (SVHC) such as phosphite ester (TNPP) and refining the design of the drum bottoms to reduce chemical residue by 60% while maintaining quality and safety standards. As to July 2024, the new drum packaging materials were successfully introduced in Fab 15B, Fab 18A, and Fab 18B. After full implementation by 2025, TSMC expects to reduce chemical residue by 3.2 million liters annually and cut carbon emissions by approximately 570 tons, thereby enhancing environmental sustainability and green manufacturing capabilities.

Improve Drum Bottom Design to Ensure Quality and Safety

General drum packaging typically features a sealing line at the bottom, leading to the retention of chemical residue post-use and complicating the recycling process. In a bid to promote environmental friendliness and safeguard human health, TSMC has been working closely with its suppliers since 2022 to revamp the design of drum bottoms. By conducting tests on various chemicals such as cleaning chemicals for Chemical-Mechanical Polishing (CMP), a new balanced design incorporating grooves and sloped bottoms has been introduced to concentrate any remaining fluid within the drum at the suction point of the dip tubes, ensuring its continued utilization within the fabs. Simultaneously, suppliers are conducting verifications on leak detection and drum strength, prompting adjustments in the production parameters of the drum materials. This initiative not only guarantees the stability of chemical quality within the drums but also bolsters the safety of storage and handling procedures.

Additionally, to enhance the development of the domestic supply chain, TSMC also encourages suppliers of drum packaging materials to establish factories in Taiwan to produce components such as drum caps and dip tubes. TSMC also encourages chemical suppliers to opt for drum packaging materials from local sources to minimize carbon emissions from extensive transportation, thus improving environmental protection.

In response to the United Nations' 12th Sustainable Development Goal - Responsible Consumption and Production, TSMC will continue to work with suppliers to refine its green manufacturing capabilities. In addition to cleaning chemicals for CMP, TSMC expects to complete the evaluation and validation of the use of hydrofluoric acid, hydrochloric acid, solvent-based cleaning fluids, plating fluids, and other specialty chemicals in drum packaging, to promote the sustainable operation of the supply chain in terms of quality and safety, and to realize the common good.

TSMC Activated New Chemical Drum Packaging Plan