In response to the continuous growth in demand for raw materials as production capacity expands, TSMC stays committed to practicing green innovation. In order to ensure stable and sustainable supply of hydrofluoric acid (HF), a key chemical in the semiconductor manufacturing process, TSMC collaborates with HF suppliers to replace fluorspar with phosphate fertilizer waste to successfully produce HF without affecting the quality of the original process. As of February 2023, TSMC Fab 12A and Fab 15A have applied this eco-friendly HF, reducing the amount of fluorspar used and reducing carbon dioxide emission by 317 tons. Other TSMC 12-inch fabs are now also undergoing trial production. TSMC expects to reduce carbon dioxide emission by more than 20,000 tons after introducing this eco-friendly HF to all TSMC 12-inch fabs, equivalent to the carbon dioxide adsorption capacity of 58 Taipei Daan Forest Parks in one year, creating a circular economy and environmental sustainability.

TSMC deepens its green benefits and actively guides suppliers to expand the use of phosphate fertilizer waste to produce hydrofluoric acid. It is expected that after the completion of the second independent production line at the end of 2024, the consumption of fluorspar will be further reduced, with a total carbon reduction of more than 40,000 metric tons. In addition to improving the quality of raw materials, TSMC also continues to seek opportunities for improvement in sustainable use. The QR division continues to cooperate with various fabs to carry out internal recycling of electronic-grade sulfuric acid and electronic-grade isopropanol, and hydrofluoric acid. They also evaluate the recycling of fluorine gas from waste materials, and guide suppliers to develop related technologies to move towards the goal of sustainable resource regeneration.