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TSMC collaborates with suppliers to develop electronic-grade CuMn alloy targets, enhancing green manufacturing capabilities.
TSMC collaborates with suppliers to develop electronic-grade CuMn alloy targets, enhancing green manufacturing capabilities.
TSMC collaborates with suppliers to develop electronic-grade CuMn alloy targets, enhancing green manufacturing capabilities.

In pursuit of a sustainable vision to achieve zero waste through resource recycling, TSMC is collaborating with suppliers to innovate in the recycling and reuse of semiconductor process materials. Specifically, TSMC has developed a purification and regeneration technology for copper-manganese (CuMn) alloy targets. By employing a specialized surface chemical treatment and smelting inspection process, the Company successfully removes impurities and contaminants from used targets, transforming them into electronic-grade CuMn alloy targets that meet semiconductor process specifications. As of October 2024, this technology is in use at TSMC's Fab 15A and undergoing validation at Fab 14B. Once fully adopted across all 12-inch fabs globally, this initiative could reduce carbon emissions by over 700 metric tons annually, establishing a green, responsible supply chain.

Reusing Recycled Targets to Reduce Carbon Emissions and Enhance Environmental Friendliness

Targets, made from high-purity metals, are crucial materials in the Physical Vapor Deposition (PVD) processes of semiconductors. In the past, due to low demand and the challenges of re-purification especially to meet the stringent quality standards, used targets were rarely reused and were often processed as scrap metal by suppliers,. However, the increased demand for CuMn alloy targets in advanced processes led TSMC to launch the "Copper-manganese Alloy Target Recycling Project" in 2023. This project aims to make more effective use of metal resources, promote environmental sustainability, and enhance local supply chain technical capabilities.

TSMC collaborated with suppliers to enhance the entire process flow, including inspection, cutting, acid washing, packaging, smelting inspection, thermo-mechanical processing (TMP), and final product processing. TSMC also shared quality and process expertise to assist suppliers in validating materials and making necessary adjustments, reducing anomalies. Furthermore, the Company conducted on-site audits to optimize suppliers' production management, ensuring the recycled copper-manganese alloy targets meet semiconductor process standards and improve green manufacturing capabilities.

CuMn Alloy Target Recycling
TSMC Innovates in Electronic-grade Metal Material Recycling to Deepen Sustainable Value

TSMC is committed to innovating circular economy models. By collaborating with suppliers to enhance the quality of target materials, the Company has successfully regenerated and reused spent targets, achieving sustainable supply chain management.

M.D. Chen,Director of Corporate Analytical Laboratories at TSMC

Enhancing supply chain sustainability is a crucial aspect of TSMC's commitment to expanding ESG practices. Besides CuMn materials, the Company plans to continue guiding suppliers in upgrading their metal recycling technologies. TSMC aims to evaluate and validate recycling processes for metals such as tantalum, titanium, and cobalt to reduce raw material extraction and carbon emissions. By doing so, TSMC strives to amplify sustainable benefits and achieves collective well-being within the industry.

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