TSMC is committed to carrying out its Environmental Policy to reach the goal of zero environmental impact, and strives to enhance the air pollution control efficiency of treatment facilities. The Company has performed innovative research to develop an online real-time air pollution sensing instrument by detecting the physical signals of gas using a special electrode structure. The five gasses, including ammonia, hydrogen fluoride, hydrogen chloride, sulfuric acid, and nitric acid, can be detected simultaneously. The new instrument dramatically shortens data acquisition time from one week to one minute, enabling real-time detection and response to abnormal pollution sources. This system was implemented at Fab 2 & Fab 5, Fab 15A, Fab 18A, and Fab 18B successfully from November 2023 to April 2024, enhancing air pollution prevention and environmental protection.

The Innovative Sensor: Enhance Highly Efficiency of Air Pollution Treatment

In the past, TSMC factory flue inspections used manual sampling to investigate emission source traceability and scrubber treatment efficiency. To better understand the status of pollutants in TSMC’s flues and the effectiveness of improvements, the Company began to develop a real-time air pollution monitoring system in January 2023. The resonance in alternating current circuits for gas detectors was applied to real-time sensors for acid and alkali exhaust. When gas makes contact with the electrode, specific resonance signals and intensity changes can be sensed with alternating current to achieve the effect of quickly identifying the type and concentration of pollution sources.

In addition, unlike manual sampling, which can only present non-real-time data at a single point in time, the air pollution monitoring system can be synchronously connected to the supervisory control and data acquisition (SCADA) system to achieve real-time, in situ, and continuous monitoring, as well as display data through trend charts. The system can not only effectively reduce the risk of workers’ exposure to acid and alkali gases while sampling, but also evaluate the optimal amount of chemicals to be put into the central scrubber based on the type and concentration of flue gas emissions, accurately adjust the pH value, conductivity, and control the amount of cleaning water. 

Adhering to the green vision of zero emissions, TSMC continues to install real-time air pollution monitoring systems in Fab 3, Fab 6, and Fab 12 Phase 1, Phase 7 and Phase 8. It is expected to be introduced into all Taiwan and overseas factories by 2026. Also, chlorine, fluoride, nitrogen oxides and other gases detection will be evaluated for the gas sensing systems. The technology will also be applied to the ambient air quality monitoring station. TSMC is committed to air pollution reduction, environmental friendliness, and sustainable development.