:::
TSMC collaborates with supplier to verify of coating with Next-generation Low Temperature Polyimide formula in lithography process.
TSMC collaborates with supplier to verify of coating with Next-generation Low Temperature Polyimide formula in lithography process.
TSMC collaborates with supplier to verify of coating with Next-generation Low Temperature Polyimide formula in lithography process.

Strengthening green chemical management is a crucial strategy for TSMC to ensure product quality. As part of its sustainability goals, TSMC has eliminated the use of the environmentally hazardous chemical N-Methyl-2-Pyrrolidone (NMP) and Perfluoroalkyl Substances (PFAS), and has further expanded this approach to include the production of raw materials in the supply chain. By not using NMP and PFAS, TSMC has successfully encouraged suppliers to innovate and develop the next generation of Low Temperature Polyimide, a material that meets manufacturing process requirements for high hardness, high strength, and chemical resistance. As of April 2024, this new material has been introduced in TSMC's 5nm, 3nm, and 2nm advanced processes, with plans to enter trial production in the second half of 2024, achieving both environmental and quality benefits.

TSMC is investing in R&D resources to enhance the development capabilities of key materials among its suppliers and improve sustainability management. This will drive the competitiveness of the semiconductor industry and promote mutual benefits for the industry as a whole.

Vanessa LeeSenior Director of Materials Management and Production Equipment Procurement Division at TSMC

Cross-departmental Infusion of Professional Resources Strengthens Green Manufacturing for Suppliers

Low Temperature Polyimide is a critical material for semiconductor lithography and packaging processes, providing good insulation performance and stability due to its high hardness and chemical resistance, protecting wafers from external environmental impact. In the past, NMP and PFAS were the chemicals suppliers used to produce Low Temperature Polyimide. Based on TSMC’s commitment to protecting human health and reducing environmental impact, the Company has extended its its management of hazardous substances to the supply chain. TSMC’s Material Supply Chain Management organization (MSCM) joined with the Advanced Technology and Mask Engineering (ATME), Advanced Packaging Technology and Service (APTS), Nano Materials Center (NMC), and Incoming Material Quality & Reliability Department (IMQR) to establish a cross-departmental team of material experts to work with suppliers on different chemical formula designs and cross-linking experiments to select materials that meet specific process requirements. This approach not only completely eliminates the use of NMP and PFAS in the manufacturing process, but also solves quality instability and impurity contamination problems. Additionally, TSMC also accelerates product development and strengthens green manufacturing capabilities by continuously improving suppliers’ materials certificate of analysis (CoA) and strengthening incoming quality control (IQC).

TSMC Introduces Next-generation Low Temperature Polyimide Process
TSMC Introduces Next-generation Low Temperature Polyimide, Elevating Environmental Sustainability in Materials Innovation

Standing by its commitment to hazardous substance management, TSMC has conducted a comprehensive inventory of raw materials containing NMP and PFAS in different processes. In addition to Low Temperature Polyimides, TSMC is also researching and evaluating elimination of PFAS with more than four carbon atoms from chemicals used in the photolithography process. Through continuous cooperation with suppliers to develop more diverse and environmentally friendly new materials, TSMC protects the safety of employees and the industry supply chain, while improving the research and development and manufacturing capabilities of suppliers, reducing the risk of operational interruption, and promoting environmental sustainability.

Related Cases

StayConnected
Stay
Connected
Subscribe ESG Newsletter