Three Innovations of TSMC AI-powered Water Chiller System Improve Energy-efficiency

TSMC is committed to driving green manufacturing and actively implements energy-efficiency innovations. The Company continues to optimize the energy-saving model of the chiller water system through machine learning methods, successfully developing three functions including "single chiller compressor abnormal energy consumption detection," "multi-chiller compressor operating load precision forecast," and "chiller water system pressure control optimization." TSMC introduced the three functions to Fab 15A wafer fabrication plants in January 2022, saving two million kWh of electricity and reducing 1,000 metric tons of carbon by November 2022. In 2023, all TSMC 12-inch wafer fabs in Taiwan will begin to adopt the three functions, which are also listed as standard designs for new plant. Those initiatives are expected to save 100 million kWh of electricity per year and reduce carbon by 50,000 metric tons.

TSMC AI-powered Chiller Water System Upgrade Roadmap

Develop Energy-saving Models and Improve Energy Efficiency Constantly

A chiller water system is mainly composed of chiller compressor, cooling water pump, cooling tower, chiller water pump, heat recovery and other ancillary equipment. The wafer manufacturing process relies on the chiller water system for cooling, stablizing clean room temperature and humidity to ensure stable operation of the machine. To improve operation efficiency of the chiller water system, TSMC's factory organization has developed machine learning models for the chiller compressor (stand-alone), the chiller compressor (multi-machine), and the chiller water system, creating three innovative functions to improve equipment reliability and optimize energy efficiency.

Three Innovative Functions of TSMC AI-powered Chiller Water System

TSMC actively invests in green innovation. The Company continues to develop energy-saving models for chiller water systems to optimize operational efficiency, and it also evaluates the retrofit of chiller water system's equipment, creates more energy-saving opportunities and benefits through both software and hardware upgrade, and moves toward the sustainable goal of achieving net zero emissions in 2050.