TSMC and suppliers develop Intelligent CDA Flow Control System for test tools to reduce CDA usage and save power.
TSMC and suppliers develop Intelligent CDA Flow Control System for test tools to reduce CDA usage and save power.

TSMC Continues its Green Manufacturing Transformation, Reducing Carbon Emission by 4,473 Tons and Saving 8.91 Million kWh of Electricity

Collaborating with Supplier to Develop "Intelligent Compressed Dry Air (CDA) Flow Control System" to Save 70% of CDA Usage
Michael Chang
S.C. Wu
J.C. Chen
Hung-I Tsai

TSMC practices green manufacturing and is committed to optimizing process energy efficiency. In addition to expanding energy-saving with two strategies and six action plans, TSMC has collaborated with equipment suppliers to develop the "Intelligent Compressed Dry Air (CDA) Flow Control System" for test tools without affecting machine performance. By precisely controlling the CDA flow rate, TSMC not only saves 70% of CDA consumption in the test tools, but also saves electricity. , the system has been introduced into the Prober of , reducing and saving 8.91 million kilowatt-hour of electricity annually.

Precise Control of CDA Flow Rate by Capturing Machine Parameters, Saving CDA and Power Consumption

The purpose of wafer testing is to confirm the reliability and yield of each wafer. Depending on the , some of the test tools are supplied with CDA from the facility system on a full-time basis to ensure dryness at low temperatures and to maintain the stability of the test environment. Due to the rapid evolution of the semiconductor process, the demand for testing continues to increase. In order to improve the efficiency of test machine operation and CDA use, the Testing Operation Division started the "Intelligent CDA Flow Control System Development Project" in the third quarter of 2020. By collaborating with the equipment supplier to modify the test tool’s piping, control valves and control software system, the CDA flow rate can be automatically controlled according to the test environment by capturing the machine parameters. The control valves can be closed when the test environment is not low temperature, thus achieving the benefits of saving CDA and power.

TSMC's "Intelligent CDA Flow Control System" Operating Principle

As a global citizen, TSMC continues to promote energy-saving projects to improve energy efficiency and leave a better environment for future generations.

- F.J. Yang, Director of Testing Operations Division, TSMC

Continued Expansion of Test Machine Modification, Saving More Energy

TSMC expects to complete the modification of the existing test tools in the Advanced Backend Fabs in the fourth quarter of 2022, and to include the Intelligent CDA Flow Control System as the standard design of test tools in new Advanced Backend Fabs. This is estimated to save 40 million kilowatt-hours of electricity and reduce 20,080 tons of carbon dioxide emissions by 2026, equivalent to the carbon dioxide adsorption capacity of Taipei Da-An Forest Parks in one year. TSMC is also planning to introduce the Intelligent CDA Flow Control System into the Tester to continue to expand the energy saving benefits and move towards the goal of optimizing energy efficiency.

TSMC's Intelligent CDA Flow Control System Implementation Schedule