Enhancing energy efficiency is a crucial strategy for TSMC in practicing green manufacturing. With the advancement of semiconductor processes leading to increased hydrogen demand, TSMC has collaborated with the Green Energy System and Environment Technology Research Laboratories of the Industrial Technology Research Institute (ITRI) to promote the “Extreme Ultraviolet (EUV) Process Residual Hydrogen Resource Utilization Project.” Innovatively developing a 30 kW mixed hydrogen fuel cell power generation system, it successfully converts residual hydrogen into electricity under conditions of 50% hydrogen concentration and a flow rate of 320 liters per minute, achieving a power generation efficiency of 52.3%. This system has obtained the world’s first SEMI-S2 certification for semiconductor manufacturing equipment safety, health, and environmental standards. In 2025, TSMC plans to further develop and design a 150 kW mixed hydrogen fuel cell, aiming to convert 100% of the residual hydrogen from the EUV process into electricity, promoting more environmentally friendly production management.

Innovative Fuel Cell Technology Turns Waste Gas into Electricity

The EUV process requires  hydrogen to maintain light source cleanliness and stability, with each machine consuming over 400 liters of hydrogen per minute. After use, the hydrogen enters a vacuum pump and, due to safety concerns, is mixed with nitrogen to form residual hydrogen at approximately 50% concentration. Typically, residual gases need to be incinerated with a burning type local scrubber, requiring the addition of fuel and air to convert it into harmless gases. To utilize this residual hydrogen more efficiently, in 2021 TSMC partnered with the ITRI’s Green Energy System and Environment Technology Research Laboratories to conduct technical research. Based on Graham’s Law, which states that the diffusion rate of hydrogen is 3.74 times that of nitrogen, they overcame the traditional Proton Exchange Membrane Fuel Cell’s requirement for hydrogen purity above 99% to effectively generate electricity. By pressurizing the mixed residual hydrogen through a hydrogen pump, hydrogen circulation in the fuel cell's anode is made higher than the nitrogen circulation, allowing the hydrogen concentration to reach a stable equilibrium. This method enables power generation without needing to purify hydrogen to 99%, thereby enhancing hydrogen utilization efficiency and avoiding environmental impact.

TSMC continues to strive for excellence. Following the development of an experimental 30 kW mixed hydrogen fuel cell with the startup team from ITRI, TSMC aims for 100% resource utilization of excess hydrogen from the EUV process. In 2025, based on the estimated actual hydrogen consumption from the process, the Company will develop a 150 kW mixed hydrogen fuel cell and initiate assessments to integrate the generated electricity into plant operations. This effort seeks to establish a more environmentally friendly green production model and contribute to the sustainable use of environmental resources.