In line with the United Nations' 12th Sustainable Development Goal-Responsible Consumption and Production-TSMC is actively establishing a green circular regeneration system through its electronics-grade chemicals recycling program. Following the successful development of Cyclopentanone, its first electronic-grade product, in 2023, TSMC is continuing its collaboration with suppliers to explore the reuse of Tetramethyl Ammonium Hydroxide (TMAH) waste liquid. This research focuses on developing purification technologies that effectively remove impurities from the waste liquid, as well as refining the electrolysis and filtration processes. The end result is the transformation of waste liquid into electronic-grade TMAH solution that meets TSMC's stringent process quality standards. The solution was first introduced to Fab 14B in October 2024, with Fabs 12A, 14A, and 15A gradually adopting it from November onwards. This initiative is anticipated to reduce new liquid procurement by 24,000 metric tons and cut carbon emissions by 2,496 metric tons annually, significantly advancing resource regeneration.
TSMC collaborates with suppliers to promote a green and low-carbon supply chain. Through the electronics-grade chemicals recycling program, the Company actively aims to achieve the United Nations SDG of Responsible Consumption and Production. This initiative promotes resource regeneration and environmental sustainability, while also creating a win-win circular economy with suppliers.
Refining Purification and Electrolysis Technology to Revitalize Waste Liquid
TMAH, a highly alkaline aqueous solution, is the most widely used chemical in the semiconductor photolithography process. Its demand continues to rise with the development of advanced processes. TSMC, in collaboration with suppliers, has jointly invested in research on the recycling and regeneration of TMAH waste liquid to increase its reuse rate. When TMAH waste liquid enters a resin column for cation (TMA+) adsorption and is desorbed using hydrochloric acid to form Tetramethyl Ammonium Chloride (TMAC), TSMC enhances the quality control of recycled pure water and hydrochloric acid to prevent impurity contamination. The Company also aids suppliers by installing high-efficiency filters at the TMAC filling points to improve environmental cleanliness. The water washing time of the resin column has been extended, and trace metals/particles in TMAC are detected to control the resin column’s adsorption capacity, further strengthening the cleaning effect. The purified TMAC is then electrolyzed into electronic-grade TMAH, which undergoes micropore filter core testing with enhanced filtration quality to ensure reuse standards compliance.
TSMC is dedicated to promoting the circular economy by adhering to principles of minimizing waste output, maximizing resource recycling, and optimizing supplier management. The Company continues to develop reuseable electronic-grade chemicals and is expected to complete the development of electronic-grade Isopropyl Alcohol (IPA) by December 2024, with plans to introduce it into facilities in 2025. Furthermore, TSMC will collaborate with suppliers to assess the feasibility of purifying diluent waste liquid into electronic-grade materials, continuously improving recycling and regeneration technologies to implement sustainable resource practices.
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