In response to the United Nations Sustainable Development Goal 7, TSMC actively improves energy efficiency through innovative thinking to address the increasingly complex semiconductor manufacturing process. To create more green actions, TSMC launched the "Energy-saving and Heat-reducing Two-stage Project" targeting pipeline heating devices for advanced process tools. By optimizing existing devices and developing new materials, TSMC successfully reduces heat loss and improves energy-saving performance. As of November 2023, all 1,261 pipeline heating devices in domestic and overseas factories have been optimized and adjusted, resulting in electricity savings of 44.61 million kWh and a reduction of 22,000 tons of carbon emissions per year. This is equivalent to the annual carbon dioxide absorption of 57 Daan Forest Parks, fulfilling the commitment of TSMC’s "Environmental Protection Policy".

Optimizing Existing Devices and Introducing New Materials to Enhance Energy Efficiency

During the operation of semiconductor processing equipment, the reaction gases produced are transported through the pipeline system to relevant processing equipment. Generally, heating devices are installed outside the pipeline to reduce the risk of pipeline blockage caused by crystallization due to temperature changes during gas transportation. To keep energy consumption from increasing as the number of production tools and heating devices increase, TSMC launched a two-stage plan in 2018. The first stage was to optimize existing devices. By conducting a comprehensive inventory of the characteristics and flow rate of reaction gases produced by different processing equipment and testing the degree of pipeline blockage, a total of 508 heating devices were removed and 209 heating devices were adjusted based on process requirements to optimize the temperature settings and increase the thickness of insulation. This not only improved the overall energy efficiency but also reduced the workload of pipeline maintenance for employees, resulting in total energy savings of 36.12 million kWh.

In the second stage, TSMC developed a new type of aerogel material for insulation materials. The high insulation and low thermal conductivity properties of the aerogel were verified to effectively reduce heat dissipation. Compared with the original fiberglass material, this new method can save an additional 20-30% energy. This innovative approach was recognized with the first TSMC ESG AWARD and has been implemented. Currently, 544 existing devices have been retrofitted, saving 8.49 million kWh, while new heating devices have been directly introduced into new Fabs. The updated procurement specifications have been included in the future standard equipment, strengthening the energy-saving effect.

TSMC is committed to maximizing energy efficiency in its production tools as part of its sustainability goals. In addition to maintaining the efficiency of existing tool heating systems, the company has introduced new heating systems in new factories. In 2024, TSMC will initiate an energy-saving verification program, with a goal to save 80 million kWh by 2030 in order to achieve its zero-emission vision.