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TSMC collaborates with suppliers to optimize the High-gravity Rotating Packed Bed equipment, effectively reducing the COD emissions.
TSMC collaborates with suppliers to optimize the High-gravity Rotating Packed Bed equipment, effectively reducing the COD emissions.
TSMC collaborates with suppliers to optimize the High-gravity Rotating Packed Bed equipment, effectively reducing the COD emissions.

TSMC is committed to promoting sustainable water resource management. In addition to pioneering the reuse of industrial recycled water in the semiconductor manufacturing process, the Company also continues to use innovative technologies to improve the effectiveness of water pollution prevention and control. To reduce chemical oxygen demand (COD), TSMC worked with suppliers to optimize the High-gravity Rotating Packed Bed equipment and adopted gas stripping technology to remove isopropanol (IPA) from the organic waste liquid COD. This has effectively increased the reduction rate by 70%. TSMC successfully introduced this innovative technology to the Fab 15B wafer plant in June 2023, which has helped to reduce COD emissions by 99,635 kilograms in just two months. With the introduction of High-gravity Rotating Packed Bed to advanced Fabs such as Fab 18 and Fab 20 in 2024, the Company can reduce the COD by 7,638 tons ever year, generating NT$407.31 million benefits of waste reduction.

Converting IPA from Liquid to Gas to Increase the COD Reduction Rate by 70%

In view of the increased use of organic chemical substances due to the demand for advanced process cleanliness, TSMC uses a biofilm treatment system to ensure that the concentration of organic waste liquid meets the discharge standards of the Science Park Administration. Since the operation of the system also requires the use of chemicals and produces organic sludge, in 2020, TSMC worked with suppliers to analyze the composition of organic waste liquid and found that IPA had the highest proportion. To address the high volatility of IPA, TSMC further initiated research on using High-gravity Rotating Packed Bed to remove IPA. After the organic waste liquid was concentrated by reverse osmosis, the High-gravity Rotating Packed Bed was used for gas stripping to convert IPA from liquid to gas, and then decomposed through a heat storage-type incinerator. The waste heat generated during the decomposition of IPA can also be used to provide energy for the High-Gravity Rotating Packed Bed, saving more than 50% of energy.

Process of Removing IPA Using a High-gravity Rotating Packed Bed
TSMC Optimizes the “High-gravity Rotating Packed Bed,” Generating over NT$400 Million Benefits of Waste

Developing preventive measures is an important strategy for TSMC's water stewardship. By continuously improving the organic waste liquid treatment capacity, TSMC has become a key promoter of green manufacturing and has promoted sustainable development of the environment.

Development Timeline for Using High-gravity Rotating Bed to Remove IPA
TSMC Optimizes the “High-gravity Rotating Packed Bed,” Generating over NT$400 Million Benefits of Waste

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