Air Pollution Control

TSMC is committed to reducing air pollution. In addition to compliance with the "Air Pollution Control and Emissions Standards for the Semiconductor Industry" and "Stationary Pollution Source Air Pollutant Emissions Standards" in Taiwan, TSMC's air pollution prevention practices include the adoption of best available technology, such as source categorization and multi- station treatment, as well as continuous collaboration with industry experts to improve the effectiveness of terminal prevention facilities so that concentrations of pollutants emitted to the atmosphere can be equal to or less than governmental standards.

Strategies, Targets & Achievements

  • Use Best Available Technology
    Adapt best available technology to deal with pollution caused by operations and mitigate environmental impact
  • Strengthen Monitoring of Prevention Facilities
    Leverage backup systems and dual-track management, along with pollutant monitors, to ensure that equipment functions as intended and prevent abnormal occurrences

Air Pollution Control Process

TSMC reached an average reduction rate of 95% in organic waste gas emissions for five consecutive years since 2015, higher than the 90% required by law, as a result of the highly efficient waste gas treatment systems that target different process waste gases. The average reduction rate of volatile organic gases was also up to 97.8%.

TSMC Assessment of Best Available Technology

In order to improve the capabilities of air pollution prevention facilities, TSMC continuously strives to develop reduction technology, evaluates feasibility from factors such as fab space, technical safety, and economic interests, and considers the reduction effectiveness of prevention technology to make multi- faceted, comprehensive assessments of whether to introduce such prevention technology.
Note: The size of circles represents the importance of the prevention technology. Higher emissions of pollutants have higher importance
TSMC's air pollution control complies with local regulatory standards of Taiwan and overseas subsidiaries. All equipment is provided with at least one set of backup system. TSMC has also established automatic monitoring systems to grasp the effectiveness of the exhaust gas treatment at all times.

For more information, please read TSMC 2019 Corporate Responsibility Report:

Green Manufacturing - Air Pollution Control

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