Workplace monitoiring with canister

TSMC Goes beyond Regulatory Requirements to Protect Employee Health

Establishing a long-term and low-concentration chemical exposure assessment model in semiconductor clean rooms
Victoria Wang
Aaron Wu

TSMC proactively creates a safe and healthy working environment, and is committed to introducing breakthrough innovations in occupational health management. In 2018, TSMC cooperated with the Environmental and Occupational Health Department of the National Cheng Kung University to establish an industry-first chemical exposure assessment model. This prospective model not only helps to effectively meet workplace exposure standards but prevent chemical-related occupational diseases by taking product on-site monitoring data and clean room air quality monitoring data into an exposure simulation system.

Cooperating with Academia to Know Exposure Risk of Organic Solvents

TSMC abides by the regulations from the Occupational Safety and Health Administration, and has been conducting environmental chemical monitoring in the workplace for many years. Due to the increasingly complicated processes in advanced technology, the kinds of machines and chemicals are growing more diverse. In order to effectively prevent all types of occupational diseases and create a healthy workplace, TSMC continues to look for more groundbreaking methods.

In 2018, TSMC cooperated with the National Cheng Kung University on a project that quantified the exposure risk of organic solvents for employees working in clean rooms. The result reveals that regardless of seniority, the carcinogenic risk of organic solvents to employees working in litho-related process areas is less than 1x10-6 (non- carcinogenic risks is less than 1). This result is much lower than the less than the 1x10-3 risk ruled by the Supreme Court of the United States , and less than the 1x10-4 recommended from the US Occupational Safety and Health Agency. Through this empirical and science-based evidence, TSMC is able to prevent chemical-related occupational diseases more effectively.

Carcinogenic Risk Absorption Factor : 100%
Male Employee Female Employee
5yrs 7.77 x 10-8 7.15 x 10-8
10yrs 1.55 x 10-7 1.43 x 10-7
15yrs 2.33 x 10-7 2.15 x 10-7
20yrs 3.11 x 10-7 2.86 x 10-7
30yrs 4.66 x 10-7 4.29 x 10-7
45yrs 6.99 x 10-7 6.44 x 10-7

Fulfilling Health Protection with High Standards

The high-tech industry cannot completely avoid the use of organic solvents or chemicals which may cause adverse health effects. Adverse health effects occur when employees are continually exposed to these chemicals without proper protection for a long time. Therefore, TSMC adopts high standards to protect the health of employees.

TSMC High-Standard Health Protection Measures
Prefer non-high health risk chemicals for developing new technology.
Fabs adopt the world's most advanced protection measures for employees.
Process tools are equipped with sufficient ventilation and exhaust according to the standards of Semiconductor Equipment and Materials International (SEMI) to minimize chemical leakage in working place.
Efficient toxic gas detectors are deployed all around the working place. When gas leakage is detected, the automatic broadcast informs employees to evacuate to the designated safe place.