Collaborative robots replace wafer manual handling by human
TSMC introduces the safety interlock design of collaborative robots to Taiwan OSHA officials
TSMC introduces the safety interlock design of collaborative robots to Taiwan OSHA officials

TSMC Introduces Collaborative Robots to Reduce Ergonomic Injuries at 6/8–Inch Wafer Fabs

Achievements Were Shared Among Industry, Government and Academia to Cultivate Mutual Interests
Victoria Wang
C.Y. Huang

With the rapid development of industrial automation technology, TSMC’s12-inch wafer manufacturing factories use Automatic Material Handling Systems (AMHS) to replace most of the manual wafer handling by employees. As a result, it significantly reduces ergonomic injuries caused by human factors due to repetitive handling of wafers. Although our 6-inch and 8-inch factories have limited space to install AMHS, we have introduced collaborative robots to reduce repetitive motion and take care of employee health .

Collaborative Robot Milestone

Since the original industrial robot regulations by Taiwan’s Ministry of Labor were not applicable to modern industrial manufacturing environment, TSMC proactively joined hands with domestic industrial robot experts to present best practices from advanced countries and to share ideas with the Occupational Safety and Health Administration (OSHA) of the Ministry Of Labor. OSHA then revised and announced the new “ Industrial Robot Hazard Prevention Standard” on February 14th, 2018. In order to implement the new standard effectively, OSHA invited TSMC to jointly hold two collaborative robot practice observation tours. The Director General and Deputy Director General of OSHA, Tzou Tzu-lien and Chou Teng-Chun, led 60 labor inspectors to visit and participate in the safety management experience sharing on collaborative robots by TSMC. TSMC continues to cooperate with industries, government and universities to build a safe and healthy workplace.

Potential Risk and Safety Requirement of Collaborative Robots