TSMC Introduces the high-efficiency spray equipment to thermal wet local scrubbers in Fab 18B to improve the PM2.5 reduction rate.
TSMC Introduces the high-efficiency spray equipment to thermal wet local scrubbers in Fab 18B to improve the PM2.5 reduction rate.

TSMC Improves Air Pollution Prevention Facilities, Pushing Ambient Fine Particulate Matters (PM2.5) Reduction Rate to 86%

Hsin-Wei Huang
M.C. Yao
Lucas Lu
M.L. Lee

TSMC makes sure the Environmental Policy is completely implemented and actively continues to optimize the efficiency of air pollution prevention facilities. The launched high-efficiency water spray devices for local scrubbers used in the diffusion process which increased the removal efficiency of hydrochloric acid and ambient fine particulate matters (PM2.5) by 87% and 86%, respectively. , TSMC successfully introduced the devices to Fab 15B and Fab 18B and incorporated them into the standard design for new TSMC fabs. For existing fabs, a three-year upgrade plan will be carried out to improve the efficiency of air pollution prevention facilities and promote environmental sustainability.

Develop High-efficiency Spray Devices to Enhance the Removal Capabilities of Particulate Matters

While advanced semiconductor manufacturing technology continues to evolve, TSMC also pays attention to improving the removal efficiency of process exhaust gas treatment. According to the characteristics of exhaust gas generated by the semiconductor process, TSMC uses for pre-treatment. Notably, thermal-wet local scrubbers that target exhaust gases from boiler tubes as Dichlorosilane (DCS) and chlorine used in boiler tubes create hydrogen chloride and large amounts of particulate matters within the facility. In order to improve the removal efficiency of the wasted gas, TSMC is working with vendors to develop high-efficiency spray devices. The proposed devices are composed of an air-water optimizing spray nozzle and a particulate matter removal system which is integrated with the function of the sprinkling water. The device uses high-pressure air to vaporize liquid droplets and reduce the diameter of particulate matters, allowing it to coagulate into a larger solid particulate matter that can then be intercepted by the particulate matter removal system for enhanced removal efficiency.

TSMC Improves Air Pollution Prevention Facilities

TSMC Continues to Introduce New Air Pollution Prevention Facilities to Control the Quality of the Air Pollution Treatment

In addition to improving existing air pollution prevention, TSMC has also continued to introduce new equipment to increase the removal rate of pollutants. The (2,500 liter/minute) burn-wet local scrubber was introduced in Fab 12B. The burn-wet scrubber not only reduced pollutants by over 95% but also was able to reduce thermal loss by 38% through its centralized high-temperature treatment mechanism. Furthermore, it reduced the required surface area by 37%, and pipeline installation fees/maintenance labor by 50%. As such, the new burn-wet scrubber has now been listed as a standard for new facilities in the future. Furthermore, to enhance the reduction rate of particulate matters, TSMC will introduce the new filter to the existing wet-type local scrubbers in 2023. The estimated reduction rate of particulate matters will increase by 70% because this new filter has a higher than the older filter, which means that more particulate matters can be captured.

Timeline for Local Scrubber Evolution