TSMC retrofits wet film plate of scrubbing/humidification system of MAU, reducing the energy consumption of the washing pump by 80%.

TSMC Retrofits Clean Room Makeup Air Handling Unit, Saving 149 Million kWh of Electricity

Mark Chen
James Tsao
Fu-Chun Chang
C.N. Chang

TSMC is committed to improving energy efficiency. After retrofitting test tools to save consumption of compressed dry air (CDA) and electricity, we also introduced wet film plate humidification systems (aka evaporator plate) for the air scrubbing/humidification system of the Makeup Air Handling Unit (MAU) in the clean room. , a total of 266 MAUs have been refitted in existing fabs, and 413 new MAUs have been designed and introduced as standard for new fabs, saving a total of 149 million kWh of electricity, and continuing the implementation of green manufacturing with concrete actions.

Research and Development of Wet Film Plate Strengthens Washing Result, Effectively Saving 80% of Electricity

The scrubbing/humidification system of the makeup air handling unit uses water as the medium for mass transfer. The water is pressurized and atomized by the water pump. The water is then refined into water particles of a specific diameter by the nozzle. The air intake and water particles undergo inertial collision, mass transfer, dissolution and other effects to remove micro-pollutants in the air to maintain makeup air quality of the clean room. Because the traditional scrubbing/humidification system is limited by the size of the MAU, it cannot increase the contact time between the atomized water particles and the air, and the electricity consumption of the washing pump accounts for 20% of the electricity consumption of the air and water transportation of the clean room in the air conditioner. In order to improve energy efficiency, TSMC and vendors worked together to develop wet film plate humidification systems, which form a large area water film by attaching fine water mist to the wet film panels to increase the retention time of external air, increase the area of airflow wetting and make the water film. It can absorb more micro-pollutants contained in the outside air, which not only strengthens the washing effect, but also reduces the horsepower of the pump, which can reduce electricity consumption by 80% and achieve energy-saving benefits.

TSMC Air Scrubbing/Humidification System and Makeup Air Handling Unit Continues to Improve

Renovation of Existing Fabs and Introduction of New Fabs, Pursuing Higher Energy Performance

TSMC is committed to expanding energy-saving effects. It is estimated that by the end of 2022, existing fabs will have completed the retrofit of 316 units of MAUs, saving 11 million kWh of electricity. The entire retrofit project is forecasted to be completed in 2024. New fabs will continue to carry out the introduction of the new wet film plate design in MAU, fulfilling green manufacturing commitments and moving towards the goal of sustainable mutual benefit.