Semiconductor Industry's First Ammonia Nitrogen Wastewater Reclamation System

TSMC introduced the first resource reclamation system for ammonia nitrogen wastewater in Taiwan. In 2016, this technique helped TSMC save 46,889 metric tons in sulfuric acid purchases while also reducing ammonia concentration in wastewater. This ammonia wastewater reclamation technique can not only reduce sulfuric acid purchase but also reduce ammonia in wastewater and produce valuable products, achieving simultaneous benefits and realize the circular economy.

Flow Chart of Ammonia Nitrogen Wastewater Reclamation